CONVEYANCE VEHICLE FOR CLEAN ROOM

摘要

PURPOSE:To restrain the disturbance of an air current due to the movement of a conveyance vehicle or a moving robot when a product or the like is conveyed inside a clean room in which it is required to prevent dust particles or the like from being scattered due to the disturbance of the air current. CONSTITUTION:A conveyance vehicle is constituted of the following: a moving stand 11 which is provided with a moving mechanism; and an installation chamber which is fixed to the moving stand 11 and which stores an object to be conveyed at the inside. The air can be ventilated between the installation chamber and the moving stand 11. A fan 13 is installed at the moving stand 11 or the installation chamber. The air is taken in from one part of the installation chamber by means of the fan 13. The cleanliness of the air is increased by a filter. When the air flows from the upper part of the object to be conveyed inside the installation chamber to the lower part, it keeps the cleanliness of the object to be conveyed and discharged to the outside from an air discharge port 17 installed at one part of the moving stand 11. The air which is sent to the fan 13 from air inhalation ports 14, 16 at the rear and the side direction with reference to the traveling direction of the conveyance vehicle is taken in from the outside. Thereby, it is possible to restrain the disturbance, of an air current, which is caused by the movement and the operation of the conveyance vehicle and a moving robot inside a clean room, and it is possible to restrain a drop in the cleanliness of the clean room.