| 摘要 |
PURPOSE:To enhance reliability and to increase yield by smoothly and perfectly filling a through hole for leading out a lead electrode made on the fixed electrode side of a capacitive acceleration sensor. CONSTITUTION:A silicon substrate 1 on the movable electrode 3 side is sandwiched by glass substrates 10, 20 on upper and lower fixed electrode. 11, 12 sides and a through hole 12 is made through at least one of the glass substrates 10, 20. The through hole 12 is filled with filler 16. A groove part 4 for receiving the filler 16 is formed at a position of the substrate 1 opposing to the through hole 12 and thereabout while ventilation groove parts 4a, 4b are formed continuously with the groove part 4 while communicating with a movable electrode space 17 and outer space. The groove part 4b is partially provided with a dam-like protrusion 5 which partially elevates the bottom of the ventilation groove thus preventing the filler from flowing into the movable electrode space 17. |
