| 摘要 |
PURPOSE:To exactly and easily execute a correction work of a defect by detecting a defect of a pattern formed on a mask film, and projecting and displaying a defect position based on this defect information. CONSTITUTION:Between a film loading part 5A and a film unloading part 5B, a defect inspecting part 6 for reading an image of a pattern of a mask film MF loaded on an inspection table 4 and inspecting a defect is provided. Also, by an illumination light source 61 such as a fluorescent lamp, etc., provided in the lower side than the inspection table 4 in a middle position of a base plate 1, the mask film MF on the inspection table is allowed to transmit through and illuminated. Moreover, a film carrier 72 is reciprocated along a film carrying guide 62, and a microfilm sucked to a film suction nozzle 73 is tuck to a prescribed part of the mask film MF. In this microfilm, a detected defect display can be converted to a developed image in the part corresponding to the pattern defect of the mask film MF detected by the defect inspecting part 6. |
