发明名称 |
MEASURING METHOD FOR LUMINANCE OF SEMICONDUCTOR PELLET |
摘要 |
PURPOSE:To improve a luminance measuring accuracy due to an irregularity in a mounting position accuracy of a semiconductor element to be measured on a measuring base and a variation in a shade of a probe needle in contact with an electrode of the element to be measured and to alleviate a damage of the element at the time of measuring. CONSTITUTION:A method for measuring luminance of a semiconductor element 2 to be measured employs a method for bringing an etching mesh 7 into contact with electrodes of the element 2 to be measured to largely improve luminance measuring accuracy from + or -10% of prior art to + or -5% or less. |
申请公布号 |
JPH05343745(A) |
申请公布日期 |
1993.12.24 |
申请号 |
JP19920144675 |
申请日期 |
1992.06.05 |
申请人 |
TOSHIBA CORP |
发明人 |
NAKAJIMA KIYOKATA;UEDA TAKENAO |
分类号 |
G01J1/02;H01L21/66;H01L31/02;H01L33/00 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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