发明名称 MEASURING METHOD FOR LUMINANCE OF SEMICONDUCTOR PELLET
摘要 PURPOSE:To improve a luminance measuring accuracy due to an irregularity in a mounting position accuracy of a semiconductor element to be measured on a measuring base and a variation in a shade of a probe needle in contact with an electrode of the element to be measured and to alleviate a damage of the element at the time of measuring. CONSTITUTION:A method for measuring luminance of a semiconductor element 2 to be measured employs a method for bringing an etching mesh 7 into contact with electrodes of the element 2 to be measured to largely improve luminance measuring accuracy from + or -10% of prior art to + or -5% or less.
申请公布号 JPH05343745(A) 申请公布日期 1993.12.24
申请号 JP19920144675 申请日期 1992.06.05
申请人 TOSHIBA CORP 发明人 NAKAJIMA KIYOKATA;UEDA TAKENAO
分类号 G01J1/02;H01L21/66;H01L31/02;H01L33/00 主分类号 G01J1/02
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