| 摘要 |
<p>PURPOSE:To obtain a MIM panel having the display quality better than the display quality of TFTs at a low cost by constituting nonlinear resistance elements as MIM elements consisting of a specific compsn. CONSTITUTION:This liquid crystal display device is provided with plural row electrodes provided on a substrate 1 and plural column electrodes disposed to intersect with the row electrodes on a counter substrate facing this substrate 1 and is disposed with the nonlinear resistance elements for switching in picture element parts formed in a matrix form in the parts where the row electrodes and the column electrodes intersect. Display is made by electrically driving the liquid crystal sealed between the substrates. Each of the nonlinear resistance elements is the MIM element, the lower electrode 3 of which consists of N-Ta, the element insulating film 4 of N-TaOx and the upper electrode 5 of N-Ta. In addition, N is incorporated at >=10atomic% into the N-TaOx of the element insulating film 4 in particular. Since the addition of the N by as much as the amt. necessary for the element insulating film 4 is possible, the display quality better than the display quality of the TFT element is obtainable.</p> |
