| 摘要 |
PURPOSE:To provide a pellicle frame capable of uniformly forming an adhesive layer at the inside face without generating film breaking at the time of sticking the pellicle film and without damaging a mask at the time of repairing the pellicle. CONSTITUTION:Four corners respectively formed between the adhesive face of the pellicle film and the outside face, the inside face and between the adhesive face of the mask and the outside face, the inside face are chamfered and respective four corners of the outside face and the inside face of the pellicle frame are curved. |
