| 摘要 |
<p>PURPOSE:To prevent the deterioration in characteristics and degradation in reliability in the stage for production of the active matrix substrate by forming protective films prior to the formation of substrate elements, such as switching elements, wirings and pixel electrodes, on a line glass substrate. CONSTITUTION:The protective film 2a is formed on the soda glass substrate which is a base, over the entire surface of this soda glass substrate. The protective film 2b is formed also on the surface of the substrate on the side opposite from the surface formed with this protective film 2a. The protective films 2a, 2b are formed before the substrate elements, such as switching elements, wirings and pixel electrodes, are formed on the soda line glass substrate. Since the protective films 2a, 2b are previously formed on both surfaces of the soda line glass substrate, the elution of the ion impurities from the soda line glass substrate is prevented even in the case of formation of the switching elements on the one surface of the soda line glass substrate. Then, the contamination of the substrate elements and the circumference is prevented.</p> |
