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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05343512(A)
申请公布日期
1993.12.24
申请号
JP19920149514
申请日期
1992.06.09
申请人
SEIKO EPSON CORP
发明人
MIZUNO TATSUO
分类号
H01L21/762;H01L21/316;H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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