| 摘要 |
PURPOSE:To realize operation under ultrahigh vacuum by protecting the driving section of an ultrasonic motor against seizure. CONSTITUTION:This is a driver for ultrahigh vacuum ultrasonic motor comprising an ultrasonic motor, having a slider 15 movable while being press fit to drive elements 12, for driving a driven body such as a probe 17 under ultrahigh vacuum. Press fitting force is applied onto the slider 15 from a leaf spring 18 through a roller 16. The leaf spring 18 is arranged such that the press fitting force is weakened through thermal expansion thereof so that the press fitting force being applied on the slider 15 is weakened automatically when the ultrasonic motor is heated under vacuum for the purpose of degassing thus preventing seizure at the driving section. |
