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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05343437(A)
申请公布日期
1993.12.24
申请号
JP19920153129
申请日期
1992.06.12
申请人
NEC KANSAI LTD
发明人
SHIMIZU KEIJI
分类号
H01L21/28;H01L21/338;H01L29/812;(IPC1-7):H01L21/338
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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