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发明名称
EXPOSURE APPARATUS
摘要
申请公布号
JPH05343298(A)
申请公布日期
1993.12.24
申请号
JP19920150241
申请日期
1992.06.10
申请人
NIKON CORP
发明人
NARAKI TAKESHI
分类号
G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
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代理人
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