MICROWAVE PLASMA PROCESSING DEVICE,申请号JP19920170070-传众专利搜索

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发明名称	MICROWAVE PLASMA PROCESSING DEVICE
摘要
申请公布号	JPH05343195(A)	申请公布日期	1993.12.24
申请号	JP19920170070	申请日期	1992.06.03
申请人	SUMITOMO METAL IND LTD	发明人	YAMADA MINORU
分类号	C23C16/50;C23C16/511;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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