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发明名称
PROBING SUBSTRATE
摘要
申请公布号
JPH05341302(A)
申请公布日期
1993.12.24
申请号
JP19920170146
申请日期
1992.06.04
申请人
TOKYO ELECTRON YAMANASHI KK
发明人
YAMASHITA SATORU
分类号
G01N21/88;G01N21/956;G01R31/26;G02F1/13;G02F1/1343;(IPC1-7):G02F1/134
主分类号
G01N21/88
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