METHOD FOR DRYING PHOTOSENSITIVE COATING FILM

摘要

PURPOSE:To provide a method for drying photosensitive coating film without causing development of unevenness so as to enhance the quality of the film. CONSTITUTION:A method for drying a photosensitive coating film comprising a step that a substrate to be processed is coated with photosensitive organic material dissolved in solvent a step that the solvent is dried and a step that after the drying the selective exposure and the development are successively applied to the photosensitive material to form a pattern made of organic material on the substrate, wherein after the substrate coated with the photosensitive organic material is placed on a plate made of material having a large thermal capacity, this plate is put on an oven and is then heated.