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发明名称
METHOD FOR DRAWING PATTERN IN FABRICATING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05343303(A)
申请公布日期
1993.12.24
申请号
JP19920152305
申请日期
1992.06.11
申请人
OKI ELECTRIC IND CO LTD
发明人
TOSAKA YASURO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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