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发明名称
Verfahren zur nacheinanderfolgenden Belichtung kleiner Abschnitte eines Halbleiterwafers
摘要
申请公布号
DE3510480(C2)
申请公布日期
1993.12.23
申请号
DE19853510480
申请日期
1985.03.22
申请人
USHIO DENKI K.K., TOKIO/TOKYO, JP
发明人
KIRA, TAKEHIRO, KOBE, HYOGO, JP
分类号
G03F7/20;H01J61/20;H01J61/82;H01L21/027;(IPC1-7):G03F7/22;H05B41/36;H01L21/31
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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