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发明名称
摘要
申请公布号	JPS5540767(Y2)	申请公布日期	1980.09.24
申请号	JP19720129469U	申请日期	1972.11.10
申请人		发明人
分类号	H01L21/52;H01L21/60;H01L23/12;H01L23/48;H01L23/50;(IPC1-7):H01L23/48	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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