METHOD FOR FABRICATING MONOLITHIC CHIP CONTAINING INTEGRATED CIRCUITRY AND SELF-SUPPORTING MICROSTRUCTURE
摘要
The invention comprises a method for fabricating a monolithic chip containing integrated circuitry as well as a suspended polysilicon microstructure. The inventive method comprises 67 processes which are further broken down into approximately 330 steps. The processes and their arrangement allow for compatible fabrication of transistor circuitry and the suspended polysilicon microstructure on the same chip.
申请公布号
WO9325915(A1)
申请公布日期
1993.12.23
申请号
WO1993US04303
申请日期
1993.05.06
申请人
ANALOG DEVICES, INC.
发明人
TSANG, ROBERT, W., K.;CORE, THERESA, A.;SHERMAN, STEVEN, J.;BROKAW, A., PAUL