Probe tip lowering and setting system for film conductivity spreading resistance measurement on substrate - arranges probe, carrier and optical, inductive or capacitive path measuring unit on common force-exerting frame , which is fixed to linear drive.

摘要

The measuring tip (1) is clamped in an adjustable carrier (2), which is connected with a displacement measuring unit (3). The measuring tip, the carrier and the displacement measuring unit are arranged at a common force exerting frame (5). The frame is connected rigidly with a positionally controllable linear drive (6). The carrier (2) is vertically movable and is clamped between two leaf springs (7). The springs are fixed to the common frame (5). The displacement measuring unit (3) can take the form of a capacitive sensor, an inductive sensor or an optical sensor. ADVANTAGE - Permits controlled lowering and application of tip for carrying out conductivity or potential measurements.