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经营范围
发明名称
Measure for measuring thin film thickness.
摘要
申请公布号
EP0371550(B1)
申请公布日期
1993.12.22
申请号
EP19890202969
申请日期
1989.11.23
申请人
HOOGOVENS GROEP B.V.
发明人
DE JONGE, MARINUS WILLEM CORNELIS, IR.;LEEK, TAMIS LAMBERTUS MARIA, IR.
分类号
G01B11/06;G01N21/21;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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