摘要 |
The electro luminescence is prepared by forming MoxTayNz nitride film on a glass substrate, forming MoxTay film thereon, anodizing to form MoxTayOz oxide film, patterning it, forming a fluorescent layer and an insulating layer respectively on the electroluminescent oxide film to form an electroluminescent part, forming Cr film between several pixels of electroluminescent part, forming a-Si film thereon, patterning it to form a photodiode, forming a transparent electrode, forming a metal electrode on the back surface of the photodiode.
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