| 发明名称 |
Plasma reactor head and electrode assembly. |
| 摘要 |
<p>A plasma reactor head assembly 10 is constructed so as to receive removable and replaceable electrodes. The electrode 12 used with the assembly 10 has interior cooling passages 38 providing increased cooling capacity to the electrode. <IMAGE></p> |
| 申请公布号 |
EP0575126(A1) |
申请公布日期 |
1993.12.22 |
| 申请号 |
EP19930304590 |
申请日期 |
1993.06.14 |
| 申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
HANSELL, ERIC |
| 分类号 |
C23C16/50;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01J37/32 |
主分类号 |
C23C16/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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