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发明名称
DUST REMOVING DEVICE FOR ENTERING SEMICONDUCTOR MANUFACTURING FACTORY
摘要
申请公布号
JPH05340580(A)
申请公布日期
1993.12.21
申请号
JP19920150180
申请日期
1992.06.10
申请人
NEC YAMAGATA LTD
发明人
SATO ISAO
分类号
F24F7/06;H01L21/02;(IPC1-7):F24F7/06
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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