| 摘要 |
PCT No. PCT/EP91/01586 Sec. 371 Date Apr. 21, 1992 Sec. 102(e) Date Apr. 21, 1992 PCT Filed Aug. 21, 1991 PCT Pub. No. WO92/04569 PCT Pub. Date Mar. 19, 1992.A valve is formed from a silicon wafer (20) and has a position detector to detect by contact the position of the valve and hence reveal any malfunction. The position detector comprises a first electrical contact (54) formed on a glass support (32) mounted on the back face of the wafer (20), a second electrical contact fixed to the wafer (20) and an electrical impedance measurement circuit (resistance or capacitance according to the embodiment) between the two electrical contacts. The valve is useful in a micropump for the injection of medicaments.
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