| 摘要 |
PURPOSE:To improve optical damage resistance and corrosion resistance by performing chemical vapor deposition of SiC on a surface of a specific base body to highten the purity of SiC on the surface. CONSTITUTION:0.03-0.06mum superfine SiC powders are sintered under high temp. and high pressure, and then the base body 1 consisting of a SiC sintered compact with alpha type or beta type crystal grains in which the SiC is 99.9wt.% and the density is >=3.12g/cm<3>, is obtained, B, Al and Fe <=200ppm are respectively incorporated in the base body 1 if necessary. Subsequently on a surface of the base body 1, a SiC coating film 2 with 200-500mum thickness is vapor-deposited by a low pressure CVD method to produce a composite material. |
