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发明名称
INLINE SPUTTERING DEVICE
摘要
申请公布号
JPH05339723(A)
申请公布日期
1993.12.21
申请号
JP19920150171
申请日期
1992.06.10
申请人
NEC CORP
发明人
MURAKAMI NORITAKE;ITO MASAKI
分类号
C23C14/34;C23C14/56;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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