| 摘要 |
A vacuum gate valve device having a vacuum path includes: a valve casing; a valve body provided in the valve casing, the valve body being allowed to reciprocate between two positions to close and open the vacuum path; a bonnet flange for closing the casing; driving member provided on the bonnet flange for reciprocably driving the valve body, the driving member having a stem shaft which is loosely inserted into a through hole of the bonnet flange and is coupled with the valve body; and a member for isolating a sliding portion of the stem shaft from the vacuum path.
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