| 摘要 |
PURPOSE:To increase the inspecting speed of a device without increasing the size of the device by irradiating the same area to be inspected with a plurality of kinds of irradiating light and forming a plurality of images in different areas of the same sensor. CONSTITUTION:After an object 1 to be inspected is positioned on a movable stage, a plurality of image pick-up areas are irradiated with a plurality of kinds of irradiating light from a plurality of lighting means 12. A plurality of images of the object 1 are formed in different image picking-up areas 14a, 14b,... of the same image pick-up means 14 through different optical paths in an image forming means 13 and the means 14 picks up the images. The area to be inspected is scanned by successively moving the stage whenever one line of picture input is completed. The output signal of the means 14 is stored in a picture memory 17 after A/D conversion 16. Since the plurality of pictures are collectively stored at the time of storing the output signal, the pictures are inspected after a dividing means 18 divides the pictures from the means 17 in corresponding to the image pick-up areas. |
