| 摘要 |
PURPOSE:To easily and correctly set a component spot of a sample at a predetermined position of a sample stage by making an optical axis of a projecting means for projecting the coordinate scale of the longitudinal and lateral directions on the sample stage agreed with a luminous flux at the center of the luminous fluxes illuminating the sample. CONSTITUTION:A scale projecting optical system P is comprised of a light source 1, a condenser lens 2, a scale plate 3 and a projecting lens 4. A mirror 5 which reflects the monochromatic light from a spectroscope 6 to be cast to a sample is located on an optical axis of the optical system P at the measuring time. However, the mirror 5 is set outside the optical axis of the optical system P when the measurement is not carried out. A stage 8 is driven in the X-axis and Y-axis directions to position an optional component spot of a plate 7 at a required position. At the same time, the stage 8 scans the scanning area of the sample component in the X-axis direction. After the plate 7 is arranged at a predetermined position of the stage 8 by a graduated scale positioning frame 9 fixed to the sample stage, the amount of light cast to the sample component from the spectroscope 6 and passing the sample component is measured by a detector 10. |
