LENS STRUCTURE FOR CHARGED BEAM,申请号JP19920140600-传众专利搜索

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发明名称	LENS STRUCTURE FOR CHARGED BEAM
摘要
申请公布号	JPH05334979(A)	申请公布日期	1993.12.17
申请号	JP19920140600	申请日期	1992.06.01
申请人	AGENCY OF IND SCIENCE & TECHNOL;NIPPON DENSHI TEKUNIKUSU KK;JEOL LTD	发明人	OKAYAMA SHIGEO;ITO TADASHI
分类号	H01J37/12;H01J37/143;H01J37/15;(IPC1-7):H01J37/12	主分类号	H01J37/12
代理机构		代理人
主权项
地址

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