SUBSTRATE HOUSING EQUIPMENT

摘要

PURPOSE:To restrain influence of dust and oxidizing atmosphere. CONSTITUTION:An equipment installed in a chamber the door 7 of which equipment is opened and shut by the pressure change in the chamber consists of a housing part 8 mounting a substrate 9, a door opening and shutting part 10 which pinches the housing part 8, and a door 7 covering the housing part 8. The door 7 is made to slide on the housing part 8 by an automatic driving mechanism installed in the door opening and shutting part 10.