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经营范围
发明名称
PLASMA GENERATION DEVICE
摘要
申请公布号
JPH05335274(A)
申请公布日期
1993.12.17
申请号
JP19920140285
申请日期
1992.06.01
申请人
HITACHI LTD
发明人
IKEGAWA MASATO;TANAKA JUNICHI;KAKEHI YUTAKA;TAMURA NAOYUKI
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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