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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05335242(A)
申请公布日期
1993.12.17
申请号
JP19920142504
申请日期
1992.06.03
申请人
HANDOTAI PROCESS KENKYUSHO:KK;ALCANTEC KK;CANON SALES CO INC
发明人
MAEDA KAZUO;TOKUMASU TOKU;NISHIMOTO HIROKO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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