| 摘要 |
PURPOSE:To obtain a compact and low-cost vibration gyro, namely, angular velocity sensor which can detect the angular velocity particularly in multi directions, i.e., two or more axial directions at the same time. CONSTITUTION:The sensor consists of a vibrating part for vibrating a flat plate part 102 up and down, and a detecting part 117 for detecting the angular velocity. A weight part 103 and a bar part 104 for supporting the weight part 103 are formed in the flat plate part 102. When the bar part 104 is warped and deformed in a direction within the plane upon receipt of the Coriolis force at the weight part 103 and the bar part 104, the angular velocity is detected from the output difference of a pair of distortion amount detecting sensors provided at the upper surface of the flat plate via the neutral face of the warp and deformation. |
