METHOD OF MANUFACTURE SOI SUBSTRATE,申请号JP19920162306-传众专利搜索

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发明名称	METHOD OF MANUFACTURE SOI SUBSTRATE
摘要
申请公布号	JPH05335530(A)	申请公布日期	1993.12.17
申请号	JP19920162306	申请日期	1992.05.28
申请人	SONY CORP	发明人	GOMI TAKAYUKI
分类号	H01L21/02;H01L21/265;H01L21/268;H01L21/76;H01L27/12;(IPC1-7):H01L27/12	主分类号	H01L21/02
代理机构		代理人
主权项
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