ALIGNING METHOD AND APPARATUS,申请号USD3461566-传众专利搜索

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发明名称	ALIGNING METHOD AND APPARATUS
摘要
申请公布号	US3461566(A)	申请公布日期	1969.08.19
申请号	USD3461566	申请日期	1966.08.19
申请人	TELEFUNKEN PATENTVERWERTUNGS GMBH.	发明人	DIETER GERSTNER
分类号	C23C14/04;G03F9/00;H01L21/00;(IPC1-7):G01B5/14	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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