Housing clamp for silicon@-glass capacitive pressure sensor with thermal compensation - holds tensioning clamping elements together by spring elements which compensate sum of product of expansion coefficient and length of clamping elements and sensor.

摘要

The sensor element (3) is clamped between two clamp elements (1,2) by applying a constant clamping force independent of temp. The clamp elements are held together by spring elements (6,7) under tension. The product of the lengths and coefficient of expansion of the spring elements compensates to null the product of the lengths and coefficient of expansion of the clamping elements and the sensor element. The clamp and spring elements can be force connected by welding. ADVANTAGE - Clamping force applied to sensor element is constant over large temp. range.