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发明名称
CLEANING EQUIPMENT
摘要
申请公布号
JPH05326476(A)
申请公布日期
1993.12.10
申请号
JP19920249252
申请日期
1992.09.18
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
NISHI MITSUO;HONDA YOSHIYUKI;KURODA YUKITERU;MUKAI EIICHI
分类号
H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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