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发明名称
ETCHING REACTION DETECTOR
摘要
申请公布号
JPH05326490(A)
申请公布日期
1993.12.10
申请号
JP19920127081
申请日期
1992.05.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
FUJII SATORU;OKANO YUKO;TOMITA YOSHIHIRO;TAKAYAMA RYOICHI
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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