| 摘要 |
PURPOSE:To provide a wire bonder in which vibration is prevented at the time of movement of frame retainer when a lead frame on a stage is clamped, moving speed is minimized when the frame retainer contacts With the lead frame, impact is suppressed, and regulation of retaining pressure is facilitated. CONSTITUTION:The wire bonder comprises a voice coil motor 10 for vertically driving a frame retainer 4 disposed oppositely to a stage 1, a position sensor 8 for detecting the position of the frame retainer 4, and a control section for controlling the voice coil motor 10 based on a detected signal from the position sensor 8 thereby controlling moving speed and retaining pressure of the frame retainer 4. |
