| 摘要 |
PURPOSE:To position a. mask and a mounting frame with high accuracy and with good reproducibility when the mask is bonded to the mounting frame and to bond the mask to the mounting frame without causing any deformation in a mask substrate. CONSTITUTION:The title bonding apparatus is provided with the following: mask holding mechanisms 12, 13 which hold an X-ray mask 16; and a mechanism 17 which aligns the mask 16 with a mounting frame 4. The title bonding apparatus is constituted in the following manner: the X-ray mask is positioned and set by using a pattern 31 formed on the absorber of the X-ray mask 16; and, in this state, the X-ray mask 16 is bonded onto the mounting frame 4 by using an adhesive 5. An elastic body 14 is interposed between the mask holding arm support mechanism 12 and the mask holding arm 13 which constitute a mask holding mechanism so that a shock force is reduced when the X-ray mask 16 comes into contact with the mounting frame 4. In addition, the mask holding arm 13 is held when it is aligned before the X-ray mask 16 is bonded, and only one part of the mask 16 is sucked. Thereby, a mechanical force acting on the mask 16 when it is bonded can be reduced, and an unbalanced force which deforms the mask 16 does not act. |
