MANUFACTURE OF SOI SUBSTRATE,申请号JP19920123896-传众专利搜索

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发明名称	MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号	JPH05326399(A)	申请公布日期	1993.12.10
申请号	JP19920123896	申请日期	1992.05.15
申请人	ROHM CO LTD	发明人	NAKAMURA TOMOHITO
分类号	H01L21/20;H01L21/02;H01L21/84;H01L27/12;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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