| 摘要 |
PURPOSE:To obtain stable and powerful output at a low voltage by providing a high-voltage electrode mounted in a laser gas flowing path, and a grounding electrode mounted in opposition to both sides of the high-voltage electrode. CONSTITUTION:The discharge gas between a high-voltage electrode 6 and a grounding electrode 5 becomes almost half, compared with the gap in the discharge gap direction of a laser gas flowing path 3. Therefore, if the gap in the discharge gap direction of the laser gas flowing path 3 increase double with the constant voltage, the laser gas flowing path 3 will be extended double, and double current will be able to flow, compared with a conventional laser device. Since the high-voltage electrode 6 is distant at intervals from a metallic vacuum container 51, there is no discharge along ions flowing 59. As a result, unnecessary discharging other than that from the electrodes 5, 6 can be prevented, and stable and powerful output can be obtained with a low voltage. |
