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发明名称
FILM CARRIER AND MANUFACTURE OF SEMICONDUCTOR DEVICE EMPLOYING FILM CARRIER
摘要
申请公布号
JPH05326648(A)
申请公布日期
1993.12.10
申请号
JP19920156107
申请日期
1992.05.22
申请人
SONY CORP
发明人
MURA MITSURU
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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