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发明名称
摘要
申请公布号
JPH0586065(B2)
申请公布日期
1993.12.09
申请号
JP19880317112
申请日期
1988.12.15
申请人
HITACHI CABLE
发明人
ONDA MAMORU
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
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