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发明名称
OPTISCHE ANORDNUNG FUER EINRICHTUNGEN DER SCHRITTWEISEN PROJEKTIONSFOTOLITHOGRAFIE
摘要
申请公布号
DD278883(B5)
申请公布日期
1993.12.09
申请号
DD19880324145
申请日期
1988.12.23
申请人
JENOPTIK GMBH,DE
发明人
KLINGENFELD,DIETMAR,DIPL.-PHYS.,DE;STAMM,GUNTER,DIPL.-PHYS.,DE;MAGES,ANDREAS,DE;ROESSLER,MANFRED,DIPL.-PHYS.,DE
分类号
G03F7/20;(IPC1-7):G03F9/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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