Dünnschichtanordnung für Tintenspritzdruckkopf und Verfahren zu deren Herstellung.

摘要

A process for manufacturing a thin film resistor substrate useful, for example, in fabricating an ink jet printhead, wherein discontinuous strips (20,22) of conductive material are initially patterned on the surface of a resistive layer (16). These strips are formed using a first series of masking and etching steps to define an "X" dimension of a resistive heater element (24). Then, the conductive strips (20,22) and resistive material therebetween are completely masked (26) in preparation for a subsequent, second etching step used to remove the exposed portions of the resistive layer (16) and thereby define a "Y" dimension of the resistive heater element (24). These steps leave smooth contours, good step coverage and high quality bevelled edges (39,40) of the thus defined conductive and resistive layers. These layers are now ready for subsequent passivation layer (42), barrier layer (44) and orifice plate (48) deposition processes to complete a thin film printhead for use in an ink jet printer.