| 摘要 |
Hard durable surface coatings comprising the elements Ti, Al, V, O, N and optionally Y and Mo are useful as surface coatings applied to machine tools and the like. The coatings are applied via three-electrode, cathodic sputtering methods wherein a biasing electrode (24) is maintained at a lesser polarity than the substrate-anode (20, 22) to aid in eliminating impurities from the coating. |
