Installation for surface treatment of components by low-pressure plasma - with the low-pressure container sealed by the component undergoing treatment

摘要

The installation for surface treatment of components by means of low-pressure plasma incroporates a low-pressure container, a vacuum pump and at least one electrode or microwave supply. The low-pressure container is open on one side at its bottom, and that during treatment this opening, is closed vacuum-tight by means of a component (13) undergoing treatment. A low pressure/vacuum is produced in the interior (3) of the container. This results in a vacuum-tight seal being formed between the component (13) and the outer container (2). USE/ADVANTAGE - In surface treatment plants. It allows treatment of component surfaces to be limited to given regions.