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发明名称
FILM FORMING METHOD
摘要
申请公布号
JPH05320865(A)
申请公布日期
1993.12.07
申请号
JP19920130907
申请日期
1992.05.22
申请人
NISSIN ELECTRIC CO LTD
发明人
EBE AKINORI;OGATA KIYOSHI;NISHIYAMA SATORU;KURATANI NAOTO
分类号
C23C14/02;(IPC1-7):C23C14/02
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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